Academic Press · William Andrew
| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| Frontiers of Thin Film Technology, Volume 28 | 978-0-12-533028-2 | 2000 | Maurice H. Francombe · Abraham Ulman |
| Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions | 978-0-8155-1220-2 | 1990 | William D. Westwood · Jerome J. Cuomo |
| Non-Crystalline Films for Device Structures, Volume 29 | 978-0-12-533029-9 | 2001 | Maurice H. Francombe · Abraham Ulman · V. M. Agranovich |
| PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing | 978-0-12-391176-6 | 2011 | |
m r · S M · S. M. R. · S R · Stephen M. R. · Stephen R. · Stephen Rossnagel