K S · K. Suzuki · Suzuki Katsumi
title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Sub-Half-Micron Lithography for ULSIs | 978-0-521-57080-0 (0-521-57080-8) | 2000 | Shinji Matsui · Yukinori Ochiai |
Sub-Half-Micron Lithography ULSIs | 978-0-521-02234-7 (0-521-02234-7) | 2008 |