| title | media type | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|---|
| Characterization and Metrology for ULSI Technology 2005 | Hardcover | 978-0-7354-0277-5 | 2005 | David G. Seiler · Robert McDonald · Caroline R. Ayre · Rajinder P. Khosla · Stefan Zollner · Erik M. Secula |
| Frontiers of Characterization and Metrology for Nanoelectronics: 2009 | " | 978-0-7354-0712-1 | 2009 | David G. Seiler · Robert McDonald · C. Michael Garner · Dan Herr · Rajinder P. Khosla · Erik M. Secula |
| Frontiers of Characterization and Metrology for Nanoelectronics: 2011 | " | 978-0-7354-0973-6 | 2012 | David G. Seiler · Robert McDonald · Amal Chabli · Erik M. Secula |
| Handbook of Silicon Semiconductor Metrology | Paperback | 978-0-367-39716-6 | 2019 | |
| Handbook of Silicon Semiconductor Metrology | Hardcover | 978-0-8247-0506-0 | 2001 | |
A.C. · A.C. Diebold · A D · Alain Diebold · C.D.
American Institute of Physics · CRC Press · Routledge