Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology (Lecture Notes in Computer Science)

Oxynitride

by F H P M Habraken

Paperback

ISBN: 978-0-387-53954-6

ISBN-10: 0-387-53954-9

Springer · 1991
See also:
1991TaschenbuchLPCVD Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology (Research Reports Esprit, Band 1)